Optical system, projection optical system, exposure device having the projection optical system, and method for manufacturing micro device using the exposure device
A Standard patent application filed on 29 August 2002 credited to Omura, Yasuhiro

Details

Application number :

2002338012  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Optical system, projection optical system, exposure device having the projection optical system, and method for manufacturing micro device using the exposure device  

Inventor :

Omura, Yasuhiro  

Agent name :

 

Address for service :

 

Filing date :

29 August 2002  

Associated companies :

 

Applicant name :

NIKON CORPORATION  

Applicant address :

2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331  

Old name :

 

Original Source :

Go  

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