Semiconductor device fabricated on surface of silicon having less than110greater than direction of crystal plane and its production method
A Standard patent application filed on 02 October 2002 credited to Ohmi, Tadahiro
;
Sugawa, Shigetoshi
Details
Application number :
2002335177
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Semiconductor device fabricated on surface of silicon having less than110greater than direction of crystal plane and its production method