Details
- Application number :
- 2002332339
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Matching device and plasma processing apparatus
- Inventor :
- Ishii, Nobuo
;
Shinohara, Kibatsu
- Agent name :
-
- Address for service :
-
- Filing date :
- 27 September 2002
- Associated companies :
-
- Applicant name :
- NIHON KOSHUHA CO., LTD.
- Applicant address :
- 1119, Nakayama-cho, Midori-ku, Yokohama-shi, Kanagawa 226-0011
- Old name :
-
- Original Source :
- Go