Electromagnetic field supply device and plasma processing device
A Standard patent application filed on 04 September 2002 credited to Shinohara, Kibatsu ; Yasaka, Yasuyoshi ; Ishii, Nobuo ; Ando, Makoto

Details

Application number :

2002328424  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Electromagnetic field supply device and plasma processing device  

Inventor :

Shinohara, Kibatsu ; Yasaka, Yasuyoshi ; Ishii, Nobuo ; Ando, Makoto  

Agent name :

 

Address for service :

 

Filing date :

04 September 2002  

Associated companies :

 

Applicant name :

ANDO, Makoto  

Applicant address :

1-1-I-312, Ogura, Saiwai-ku, kawasaki-shi, Kanagawa 211-0954  

Old name :

 

Original Source :

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