Optical system and exposure system provided with the optical system

Application number :: 2002304091
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Optical system and exposure system provided with the optical system
Inventor :: Tanaka, Issei ; Omura, Yasuhiro ; Owa, Soichi ; Shiraishi, Naomasa
Agent name :
Address for service :
Filing date :: 29 May 2002
Associated companies :
Applicant name :: NIKON CORPORATION
Applicant address :: 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331
Old name :
Original Source :: Go

Optical system and exposure system provided with the optical system A Standard patent application filed on 29 May 2002 credited to Tanaka, Issei ; Omura, Yasuhiro ; Owa, Soichi ; Shiraishi, Naomasa