Photoresist compositions for short wavelength imaging

Application number :: 2002255865
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Photoresist compositions for short wavelength imaging
Inventor :: Zampini, Anthony ; Szmanda, Charles R. ; Cameron, James F. ; Pohlers, Gerhard ; Taylor, Gary N.
Agent name :
Address for service :
Filing date :: 20 March 2002
Associated companies :
Applicant name :: SHIPLEY COMPANY, L.L.C.
Applicant address :: 455 Forest Street, Marlborough, MA 01752
Old name :
Original Source :: Go

Photoresist compositions for short wavelength imaging A Standard patent application filed on 20 March 2002 credited to Zampini, Anthony ; Szmanda, Charles R. ; Cameron, James F. ; Pohlers, Gerhard ; Taylor, Gary N.