Details

Application number :
2001290655  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Novel polymers and photoresist compositions for short wavelength imaging  
Inventor :
Szmanda, Charles R. ; Trefonas, Peter ; Taylor, Gary N.  
Agent name :
 
Address for service :
 
Filing date :
08 September 2001  
Associated companies :
 
Applicant name :
Shipley Company, L.L.C.  
Applicant address :
 
Old name :
 
Original Source :
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