Novel polymers and photoresist compositions for short wavelength imaging

Application number :: 2001290655
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Novel polymers and photoresist compositions for short wavelength imaging
Inventor :: Szmanda, Charles R. ; Trefonas, Peter ; Taylor, Gary N.
Agent name :
Address for service :
Filing date :: 08 September 2001
Associated companies :
Applicant name :: Shipley Company, L.L.C.
Applicant address :
Old name :
Original Source :: Go

Novel polymers and photoresist compositions for short wavelength imaging A Standard patent application filed on 08 September 2001 credited to Szmanda, Charles R. ; Trefonas, Peter ; Taylor, Gary N.