Photoresist compositions comprising solvents for short wavelength imaging
A Standard patent application filed on 15 March 2002 credited to Szmanda, Charles R. ; Zampini, Anthony

Details

Application number :

2002257066  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Photoresist compositions comprising solvents for short wavelength imaging  

Inventor :

Szmanda, Charles R. ; Zampini, Anthony  

Agent name :

 

Address for service :

 

Filing date :

15 March 2002  

Associated companies :

 

Applicant name :

SHIPLEY COMPANY, L.L.C.  

Applicant address :

455 Forest Street, Marlborough, MA 01752  

Old name :

 

Original Source :

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