Novel polymers and photoresist compositions for short wavelength imaging

Application number :: 2001288952
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Novel polymers and photoresist compositions for short wavelength imaging
Inventor :: Taylor, Gary N. ; Yamada, Shintaro ; Brainard, Robert L.
Agent name :
Address for service :
Filing date :: 08 September 2001
Associated companies :
Applicant name :: Shipley Company, L.L.C.
Applicant address :
Old name :
Original Source :: Go

Novel polymers and photoresist compositions for short wavelength imaging A Standard patent application filed on 08 September 2001 credited to Taylor, Gary N. ; Yamada, Shintaro ; Brainard, Robert L.