Micro-electromechanical system device
A Standard patent application filed on 31 January 2001 credited to Huang, Jenn-Hwa
;
Xu, Ji-Hai
;
Sun, Xi-Quing
;
Coffman, Samuel L.
;
Parsey Jr., John Michael
Details
Application number :
2001234700
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Micro-electromechanical system device
Inventor :
Huang, Jenn-Hwa
;
Xu, Ji-Hai
;
Sun, Xi-Quing
;
Coffman, Samuel L.
;
Parsey Jr., John Michael