Micro electro-mechanical system device with piezoelectric thin film actuator
A Standard patent application filed on 14 November 2003 credited to Park, Joon
;
Nakahira, Ron K.
;
Allison, Robert C.
Details
Application number :
2003295553
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Micro electro-mechanical system device with piezoelectric thin film actuator
Inventor :
Park, Joon
;
Nakahira, Ron K.
;
Allison, Robert C.
Agent name :
Griffith Hack
Address for service :
GPO Box 3125 Brisbane QLD 4001 Australia
Filing date :
14 November 2003
Associated companies :
Applicant name :
Raytheon Company
Applicant address :
870 Winter Street Waltham MA 02451-1449 United States of America