Cathode arc source with target feeding apparatus
A Standard patent application filed on 26 October 1998 credited to Shi, Xu ; Tay, Beng Kang ; Tan, Hong Siang

Details

Application number :

95567  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Cathode arc source with target feeding apparatus  

Inventor :

Shi, Xu ; Tay, Beng Kang ; Tan, Hong Siang  

Agent name :

 

Address for service :

 

Filing date :

26 October 1998  

Associated companies :

 

Applicant name :

Nanyang Technological University  

Applicant address :

 

Old name :

 

Original Source :

Go  

Same Inventor

• Composite coatings
• Enhanced macroparticle filter and cathode arc source
• Cathode arc source for metallic and dielectric coatings
• Filtered cathodic arc source
• Cathode arc source and graphite target