Cathode arc source for metallic and dielectric coatings
A Standard patent application filed on 26 October 1998 credited to Shi, Xu
;
Tan, Hong Siang
;
Tay, Beng Kang
Details
Application number :
95564
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Cathode arc source for metallic and dielectric coatings