Filtered cathodic arc source
A Standard patent application filed on 20 February 1996 credited to Shi, Xu
;
Tan, Hong Siang
;
Tay, Beng Kang
;
Flynn, David Ian
Details
Application number :
47265
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Filtered cathodic arc source
Inventor :
Shi, Xu
;
Tan, Hong Siang
;
Tay, Beng Kang
;
Flynn, David Ian