Method and apparatus for producing single crystal of silicon carbide
A Standard patent application filed on 26 December 2000 credited to Shigeto, Masashi
;
Nagato, Nobuyuki
;
Yano, Kotaro
Details
Application number :
22256
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for producing single crystal of silicon carbide