Method of manufacturing single-crystal silicon carbide
A Standard patent application filed on 24 December 1999 credited to Shigeto, Masashi
;
Nagato, Nobuyuki
;
Yano, Kotaro
Details
Application number :
18010
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of manufacturing single-crystal silicon carbide