Aligner, exposure method, method of pressure adjustment of projection optical system, and method of assembling aligner
A Standard patent application filed on 26 August 1998 credited to Tanaka, Yasuaki ; Miyake, Toshihiro ; Akagawa, Katsuyuki ; Nishikawa, Jin

Details

Application number :

88851  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Aligner, exposure method, method of pressure adjustment of projection optical system, and method of assembling aligner  

Inventor :

Tanaka, Yasuaki ; Miyake, Toshihiro ; Akagawa, Katsuyuki ; Nishikawa, Jin  

Agent name :

 

Address for service :

 

Filing date :

26 August 1998  

Associated companies :

 

Applicant name :

Nikon Corporation  

Applicant address :

 

Old name :

 

Original Source :

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