Method and device for exposure control, method and device for exposure, and method of manufacture of device
A Standard patent application filed on 17 April 1998 credited to Noboru, Michio ; Tanaka, Yasuaki

Details

Application number :

68536  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and device for exposure control, method and device for exposure, and method of manufacture of device  

Inventor :

Noboru, Michio ; Tanaka, Yasuaki  

Agent name :

 

Address for service :

 

Filing date :

17 April 1998  

Associated companies :

 

Applicant name :

Nikon Corporation  

Applicant address :

 

Old name :

 

Original Source :

Go