Chemical vapor deposition apparatus
A Standard patent application filed on 24 November 1997 credited to Gurary, Alexander I.
;
Stall, Richard A.
;
Salagaj, Thomas
;
Zawadzki, Peter
;
Karlicek, Robert F. Jr.
Details
Application number :
54619
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Chemical vapor deposition apparatus
Inventor :
Gurary, Alexander I.
;
Stall, Richard A.
;
Salagaj, Thomas
;
Zawadzki, Peter
;
Karlicek, Robert F. Jr.