Details
- Application number :
- 43193
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Aligner, scanning aligner and scanning exposure method
- Inventor :
- Ebihara, Akimitsu
- Agent name :
-
- Address for service :
-
- Filing date :
- 19 September 1997
- Associated companies :
-
- Applicant name :
- Nikon Corporation
- Applicant address :
-
- Old name :
-
- Original Source :
- Go