Scanning exposure method, scanning aligner, method of manufacturing the scanningaligner, and synchronization error analysing method
A Standard patent application filed on 11 August 1998 credited to Furukawa, Osamu ; Makinouchi, Susumu

Details

Application number :

85622  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Scanning exposure method, scanning aligner, method of manufacturing the scanningaligner, and synchronization error analysing method  

Inventor :

Furukawa, Osamu ; Makinouchi, Susumu  

Agent name :

 

Address for service :

 

Filing date :

11 August 1998  

Associated companies :

 

Applicant name :

Nikon Corporation  

Applicant address :

 

Old name :

 

Original Source :

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