Method and apparatus for semiconductor cleaning
A Standard patent application filed on 04 October 2000 credited to Sundin, James B. ; Dryer, Paul W. ; Tirendi, Richard S.

Details

Application number :
10731  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for semiconductor cleaning  
Inventor :
Sundin, James B. ; Dryer, Paul W. ; Tirendi, Richard S.  
Agent name :
 
Address for service :
 
Filing date :
04 October 2000  
Associated companies :
 
Applicant name :
Speed-Fam-Ipec Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

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