Method and apparatus for cleaning semiconductor wafers and other flat media
A Standard patent application filed on 09 July 2002 credited to Bexten, Daniel P. ; Norby, Jerry R. ; Bryer, James

Details

Application number :
2002320436  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for cleaning semiconductor wafers and other flat media  
Inventor :
Bexten, Daniel P. ; Norby, Jerry R. ; Bryer, James  
Agent name :
 
Address for service :
 
Filing date :
09 July 2002  
Associated companies :
 
Applicant name :
SEMITOOL, INC.  
Applicant address :
655 West Reserve Drive, Kalispell, MT 59901  
Old name :
 
Original Source :
Go  

Same Inventor