Method and apparatus for calibrating a laser wavelength control mechanism
A Standard patent application filed on 31 August 1994 credited to Fomenkov, Igor

Details

Application number :

12529  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for calibrating a laser wavelength control mechanism  

Inventor :

Fomenkov, Igor  

Agent name :

 

Address for service :

 

Filing date :

31 August 1994  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

16275 Technology Drive San Diego CA 92127-1815 United States Of America  

Old name :

 

Original Source :

Go  

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