Compositions for cleaning organic and plasma etched residues for semiconductor devices

Application number :: 49803
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Compositions for cleaning organic and plasma etched residues for semiconductor devices
Inventor :: Small, Robert J. ; Maw, Tai-Shih ; Cheng, Jun
Agent name :
Address for service :
Filing date :: 02 May 2000
Associated companies :
Applicant name :: EKC Technology, Inc.
Applicant address :
Old name :
Original Source :: Go

Compositions for cleaning organic and plasma etched residues for semiconductor devices A Standard patent application filed on 02 May 2000 credited to Small, Robert J. ; Maw, Tai-Shih ; Cheng, Jun