Compositions for cleaning organic and plasma etched residues for semiconductor devices

Application number :: 2001278890
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Compositions for cleaning organic and plasma etched residues for semiconductor devices
Inventor :: Patel, Bakul P. ; Reid, Christopher ; Lee, Wai Mun ; Small, Robert J. ; Daviot, Jerome
Agent name :
Address for service :
Filing date :: 10 July 2001
Associated companies :
Applicant name :: EKC Technology, Inc.
Applicant address :
Old name :
Original Source :: Go

Compositions for cleaning organic and plasma etched residues for semiconductor devices A Standard patent application filed on 10 July 2001 credited to Patel, Bakul P. ; Reid, Christopher ; Lee, Wai Mun ; Small, Robert J. ; Daviot, Jerome