Lactam compositions for cleaning organic and plasma etched residues for semiconductor devices
A Standard patent application filed on 17 July 2000 credited to Cheng, Jun ; Patel, Bakul P. ; Small, Robert J.

Details

Application number :

63486  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Lactam compositions for cleaning organic and plasma etched residues for semiconductor devices  

Inventor :

Cheng, Jun ; Patel, Bakul P. ; Small, Robert J.  

Agent name :

 

Address for service :

 

Filing date :

17 July 2000  

Associated companies :

 

Applicant name :

EKC Technology, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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