Details
- Application number :
- 2003229725
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Projection optical system
- Inventor :
- Mann, Hans-Jurgen
;
Zellner, Johannes
;
Fehr, Jean-Noel
- Agent name :
-
- Address for service :
-
- Filing date :
- 24 April 2003
- Associated companies :
-
- Applicant name :
- CARL ZEISS SMT AG
- Applicant address :
- Carl-Zeiss-Strasse 22, 73447 Oberkochen
- Old name :
-
- Original Source :
- Go