Semiconductor substrate, semiconductor chip, and semiconductor device manufacturing method
A Standard patent application filed on 11 March 2003 credited to Fukuyo, Fumitsugu
;
Uchiyama, Naoki
;
Fukumitsu, Kenshi
Details
Application number :
2003211575
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Semiconductor substrate, semiconductor chip, and semiconductor device manufacturing method