Universal modular wafer transport system
A Standard patent application filed on 03 September 2002 credited to Bonora, Anthony C. ; Speasl, Jerry ; Hine, Roger G. ; Gould, Richard H. ; Krolak, Michael

Details

Application number :
2002363300  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Universal modular wafer transport system  
Inventor :
Bonora, Anthony C. ; Speasl, Jerry ; Hine, Roger G. ; Gould, Richard H. ; Krolak, Michael  
Agent name :
 
Address for service :
 
Filing date :
03 September 2002  
Associated companies :
 
Applicant name :
ASYST TECHNOLOGIES, INC.  
Applicant address :
48761 Kato Road, Fremont, CA 94538  
Old name :
 
Original Source :
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Same Inventor