Unified frame for semiconductor material handling system
A Standard patent application filed on 30 August 2002 credited to Bonora, Anthony C. ; Speasl, Jerry ; Hine, Roger G. ; Gould, Richard H. ; Krolak, Michael

Details

Application number :

2002356193  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Unified frame for semiconductor material handling system  

Inventor :

Bonora, Anthony C. ; Speasl, Jerry ; Hine, Roger G. ; Gould, Richard H. ; Krolak, Michael  

Agent name :

 

Address for service :

 

Filing date :

30 August 2002  

Associated companies :

 

Applicant name :

ASYST TECHNOLOGIES, INC.  

Applicant address :

48761 Kato Road, Fremont, CA 94538  

Old name :

 

Original Source :

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