Semiconductor material handling system

Application number :: 2002327590
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Semiconductor material handling system
Inventor :: Bonora, Anthony C. ; Speasl, Jerry A. ; Hine, Roger G. ; Gould, Richard H. ; Krolak, Michael
Agent name :
Address for service :
Filing date :: 30 August 2002
Associated companies :
Applicant name :: ASYST TECHNOLOGIES, INC.
Applicant address :: 48761 Kato Road, Fremont, CA 94538
Old name :
Original Source :: Go

Semiconductor material handling system A Standard patent application filed on 30 August 2002 credited to Bonora, Anthony C. ; Speasl, Jerry A. ; Hine, Roger G. ; Gould, Richard H. ; Krolak, Michael