Chemical vapor deposition reactor
A Standard patent application filed on 04 December 2002 credited to Petrone, Benjamin J.
;
Grant, Robert W.
;
Mumbauer, Paul D.
;
Brubaker, Matthew D.
Details
Application number :
2002353021
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Chemical vapor deposition reactor
Inventor :
Petrone, Benjamin J.
;
Grant, Robert W.
;
Mumbauer, Paul D.
;
Brubaker, Matthew D.