Method and device for aligning a charged particle beam column

Application number :: 2002351104
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method and device for aligning a charged particle beam column
Inventor :: Shemesh, Dror
Agent name :
Address for service :
Filing date :: 04 October 2002
Associated companies :
Applicant name :: APPLIED MATERIALS ISREAL LIMITED
Applicant address :: 9 Oppenheimer St., Rehovot 76705
Old name :
Original Source :: Go

Method and device for aligning a charged particle beam column A Standard patent application filed on 04 October 2002 credited to Shemesh, Dror