Details

Application number :
2002351104  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and device for aligning a charged particle beam column  
Inventor :
Shemesh, Dror  
Agent name :
 
Address for service :
 
Filing date :
04 October 2002  
Associated companies :
 
Applicant name :
APPLIED MATERIALS ISREAL LIMITED  
Applicant address :
9 Oppenheimer St., Rehovot 76705  
Old name :
 
Original Source :
Go  

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