Details
- Application number :
- 2002338865
- Application type :
- Standard
- Application status :
- FILED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method and device for aligning a charged particle beam column
- Inventor :
-
- Agent name :
-
- Address for service :
-
- Filing date :
- 04 October 2002
- Associated companies :
-
- Applicant name :
- APPLIED MATERIALS ISRAEL LTD.
- Applicant address :
-
- Old name :
-
- Original Source :
- Go