High resolution patterning method
A Standard patent application filed on 25 October 2002 credited to Kynaston-Pearson, Anthony William Nigel
;
Johnson, Daniel Robert
;
Damerell, William Norman
;
Appleton, Stephen George
;
Fixter, Greg Peter Wade
Details
Application number :
2002339064
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
High resolution patterning method
Inventor :
Kynaston-Pearson, Anthony William Nigel
;
Johnson, Daniel Robert
;
Damerell, William Norman
;
Appleton, Stephen George
;
Fixter, Greg Peter Wade
Agent name :
Address for service :
Filing date :
25 October 2002
Associated companies :
Applicant name :
QINETIQ LIMITED
Applicant address :
Registered Office, 85 Buckingham Gate, London SW1E 6PD