Method and apparatus for distributing fluid to a polishing surface during chemical mechanical polishing
A Standard patent application filed on 20 June 2002 credited to Eaton, Robert A.
Details
Application number :
2002316310
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for distributing fluid to a polishing surface during chemical mechanical polishing
Inventor :
Eaton, Robert A.
Agent name :
Address for service :
Filing date :
20 June 2002
Associated companies :
Applicant name :
SPEEDFAM-IPEC CORPORATION
Applicant address :
Attention: James L. Farmer, Esq., (480) 705-2668, 305 North 54th Street, Chandler, AZ 85226