Multiprobe detection system for chemical-mechanical planarization tool
A Standard patent application filed on 16 October 2001 credited to Grief, Malcolm ; Meloni, Mark A. ; Laursen, Thomas ; Holzapfel, Paul ; Eaton, Robert ; Weldon, Matthew

Details

Application number :

2002224378  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Multiprobe detection system for chemical-mechanical planarization tool  

Inventor :

Grief, Malcolm ; Meloni, Mark A. ; Laursen, Thomas ; Holzapfel, Paul ; Eaton, Robert ; Weldon, Matthew  

Agent name :

 

Address for service :

 

Filing date :

16 October 2001  

Associated companies :

 

Applicant name :

Speed-Fam-Ipec Corporation  

Applicant address :

 

Old name :

 

Original Source :

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