Method and apparatus for manufacturing semiconductor device
A Standard patent application filed on 16 March 2000 credited to Okatsu, Toshihide
;
Hayashi, Takayuki
Details
Application number :
22379
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for manufacturing semiconductor device
Inventor :
Okatsu, Toshihide
;
Hayashi, Takayuki
Agent name :
Davies Collison Cave
Address for service :
Level 15 1 Nicholson Street MELBOURNE VIC 3000
Filing date :
16 March 2000
Associated companies :
Applicant name :
Kaneka Corporation
Applicant address :
2-4 Nakanoshima 3-chome Kita-ku Osaka-shi Osaka 530-8288 Japan