Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device by using the same
A Standard patent application filed on 30 December 2002 credited to Jang, Moon-Gyu ; Cheong, Woo-Seok ; Cho, Won-Ju ; Lee, Seong-Jae

Details

Application number :

2002359079  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device by using the same  

Inventor :

Jang, Moon-Gyu ; Cheong, Woo-Seok ; Cho, Won-Ju ; Lee, Seong-Jae  

Agent name :

 

Address for service :

 

Filing date :

30 December 2002  

Associated companies :

 

Applicant name :

ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE  

Applicant address :

161 Kajong-Dong, Yusong-Gu, 305-600 Daejon-Shi  

Old name :

 

Original Source :

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