Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof

Application number :: 2002253787
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
Inventor :: Chang, Christopher C. ; O'Donnell, Robert J. ; Daugherty, John E.
Agent name :
Address for service :
Filing date :: 21 November 2001
Associated companies :
Applicant name :: LAM RESEARCH CORPORATION
Applicant address :: 4650 Cushing Parkway, Fremont, CA 94538
Old name :
Original Source :: Go

Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof A Standard patent application filed on 21 November 2001 credited to Chang, Christopher C. ; O'Donnell, Robert J. ; Daugherty, John E.