Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof

Application number :: 65407
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof
Inventor :: Chang, Chris ; Steger, Robert J.
Agent name :
Address for service :
Filing date :: 14 June 2000
Associated companies :
Applicant name :: Lam Research Corporation
Applicant address :
Old name :
Original Source :: Go

Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof A Standard patent application filed on 14 June 2000 credited to Chang, Chris ; Steger, Robert J.