Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
A Standard patent application filed on 21 November 2001 credited to Chang, Christopher C. ; O'Donnell, Robert J. ; Daugherty, John E.

Details

Application number :
2002225628  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof  
Inventor :
Chang, Christopher C. ; O'Donnell, Robert J. ; Daugherty, John E.  
Agent name :
 
Address for service :
 
Filing date :
21 November 2001  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
4650 Cushing Parkway, Fremont, CA 94538  
Old name :
 
Original Source :
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Same Inventor