Details
- Application number :
- 2002240403
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Improved process for deposition of semiconductor films
- Inventor :
- Todd, Michael A.
- Agent name :
-
- Address for service :
-
- Filing date :
- 12 February 2002
- Associated companies :
-
- Applicant name :
- ASM AMERICA, INC.
- Applicant address :
- 3440 East University Avenue, Phoenix, AZ 85034-7200
- Old name :
-
- Original Source :
- Go
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