Apparatus and method for the in-situ generation of dopants
A Standard patent application filed on 05 August 1998 credited to Bhandari, Gautam ; Glassman, Timothy E. ; Todd, Michael A. ; Olander, W. Karl

Details

Application number :

87716  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method for the in-situ generation of dopants  

Inventor :

Bhandari, Gautam ; Glassman, Timothy E. ; Todd, Michael A. ; Olander, W. Karl  

Agent name :

 

Address for service :

 

Filing date :

05 August 1998  

Associated companies :

 

Applicant name :

Advanced Technology Materials, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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