Improved process for deposition of semiconductor films
A Standard patent application filed on 01 February 2002 credited to Todd, Michael A.
;
Hawkins, Mark R.
Details
Application number :
2002306436
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Improved process for deposition of semiconductor films
Inventor :
Todd, Michael A.
;
Hawkins, Mark R.
Agent name :
Address for service :
Filing date :
01 February 2002
Associated companies :
Applicant name :
ASM AMERICA, INC.
Applicant address :
3440 East University Avenue, Phoenix, AZ 85034-7200