Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

Application number :: 2001263444
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
Inventor :: Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Weaver, Robert A. ; Mchugh, Paul R.
Agent name :
Address for service :
Filing date :: 24 May 2001
Associated companies :
Applicant name :: Semitool, Inc.
Applicant address :
Old name :
Original Source :: Go

Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece A Standard patent application filed on 24 May 2001 credited to Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Weaver, Robert A. ; Mchugh, Paul R.