Details

Application number :
2001263444  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece  
Inventor :
Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Weaver, Robert A. ; Mchugh, Paul R.  
Agent name :
 
Address for service :
 
Filing date :
24 May 2001  
Associated companies :
 
Applicant name :
Semitool, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

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