Methods and apparatus for processing microelectronic workpieces using metrology

Application number :: 2001282879
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Methods and apparatus for processing microelectronic workpieces using metrology
Inventor :: Aegerter, Brian ; Dundas, Curt ; Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Weaver, Robert A. ; Eudy, Steve L. ; Peace, Steven L. ; Mchugh, Paul R.
Agent name :
Address for service :
Filing date :: 09 July 2001
Associated companies :
Applicant name :: Semitool, Inc.
Applicant address :
Old name :
Original Source :: Go

Methods and apparatus for processing microelectronic workpieces using metrology A Standard patent application filed on 09 July 2001 credited to Aegerter, Brian ; Dundas, Curt ; Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Weaver, Robert A. ; Eudy, Steve L. ; Peace, Steven L. ; Mchugh, Paul R.