Details

Application number :
2001282879  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Methods and apparatus for processing microelectronic workpieces using metrology  
Inventor :
Aegerter, Brian ; Dundas, Curt ; Wilson, Gregory J. ; Ritzdorf, Thomas L. ; Weaver, Robert A. ; Eudy, Steve L. ; Peace, Steven L. ; Mchugh, Paul R.  
Agent name :
 
Address for service :
 
Filing date :
09 July 2001  
Associated companies :
 
Applicant name :
Semitool, Inc.  
Applicant address :
 
Old name :
 
Original Source :
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