Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
A Standard patent application filed on 24 April 2001 credited to Schilling, Paul E. ; Biberger, Maximilian A.

Details

Application number :

2001255656  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module  

Inventor :

Schilling, Paul E. ; Biberger, Maximilian A.  

Agent name :

 

Address for service :

 

Filing date :

24 April 2001  

Associated companies :

 

Applicant name :

Tokyo electron Limited  

Applicant address :

 

Old name :

 

Original Source :

Go  

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