Injection seeded F2 lithography laser

Application number :: 36349
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Injection seeded F2 lithography laser
Inventor :: Onkels, Eckehard D. ; Das, Palash P ; Partlo, William N ; Sandstrom, Richard L ; Ershov, Alexander I. ; Duffey, Thomas P.
Agent name :
Address for service :
Filing date :: 28 November 2000
Associated companies :
Applicant name :: Cymer, Inc.
Applicant address :
Old name :
Original Source :: Go

Injection seeded F2 lithography laser A Standard patent application filed on 28 November 2000 credited to Onkels, Eckehard D. ; Das, Palash P ; Partlo, William N ; Sandstrom, Richard L ; Ershov, Alexander I. ; Duffey, Thomas P.